Interfacial mechanical testing of atomic layer deposited TiO2 and Al2O3 on silicon substrate by the use of embedded SiO2 microspheres

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Interfacial mechanical testing of atomic layer deposited TiO2 and Al2O3 on silicon substrate by the use of embedded SiO2 microspheres. / Lyytinen, Jussi; Berdova, Maria; Hirvonen, Petri; Liu, Xuwen; Franssila, Sami; Zhou, Quan; Koskinen, Jari.

julkaisussa: RSC Advances, Vuosikerta 4, Nro 70, 2014, s. 37320-37328.

Tutkimustuotos: Lehtiartikkelivertaisarvioitu

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Lyytinen, Jussi ; Berdova, Maria ; Hirvonen, Petri ; Liu, Xuwen ; Franssila, Sami ; Zhou, Quan ; Koskinen, Jari. / Interfacial mechanical testing of atomic layer deposited TiO2 and Al2O3 on silicon substrate by the use of embedded SiO2 microspheres. Julkaisussa: RSC Advances. 2014 ; Vuosikerta 4, Nro 70. Sivut 37320-37328.

Bibtex - Lataa

@article{e3699ae25da14f6a92d762b0368fa7c6,
title = "Interfacial mechanical testing of atomic layer deposited TiO2 and Al2O3 on silicon substrate by the use of embedded SiO2 microspheres",
keywords = "adhesion, Al2O3, atomic layer deposition (ALD), cohesion, embedded microspheres, interfacial fracture, interfacial mechanical testing, interfacial strength, TiO2, adhesion, Al2O3, atomic layer deposition (ALD), cohesion, embedded microspheres, interfacial fracture, interfacial mechanical testing, interfacial strength, TiO2, adhesion, Al2O3, atomic layer deposition (ALD), cohesion, embedded microspheres, interfacial fracture, interfacial mechanical testing, interfacial strength, TiO2",
author = "Jussi Lyytinen and Maria Berdova and Petri Hirvonen and Xuwen Liu and Sami Franssila and Quan Zhou and Jari Koskinen",
year = "2014",
doi = "10.1039/c4ra05807k",
language = "English",
volume = "4",
pages = "37320--37328",
journal = "RSC Advances",
issn = "2046-2069",
number = "70",

}

RIS - Lataa

TY - JOUR

T1 - Interfacial mechanical testing of atomic layer deposited TiO2 and Al2O3 on silicon substrate by the use of embedded SiO2 microspheres

AU - Lyytinen, Jussi

AU - Berdova, Maria

AU - Hirvonen, Petri

AU - Liu, Xuwen

AU - Franssila, Sami

AU - Zhou, Quan

AU - Koskinen, Jari

PY - 2014

Y1 - 2014

KW - adhesion

KW - Al2O3

KW - atomic layer deposition (ALD)

KW - cohesion

KW - embedded microspheres

KW - interfacial fracture

KW - interfacial mechanical testing

KW - interfacial strength

KW - TiO2

KW - adhesion

KW - Al2O3

KW - atomic layer deposition (ALD)

KW - cohesion

KW - embedded microspheres

KW - interfacial fracture

KW - interfacial mechanical testing

KW - interfacial strength

KW - TiO2

KW - adhesion

KW - Al2O3

KW - atomic layer deposition (ALD)

KW - cohesion

KW - embedded microspheres

KW - interfacial fracture

KW - interfacial mechanical testing

KW - interfacial strength

KW - TiO2

UR - http://dx.doi.org/10.1039/C4RA05807K

U2 - 10.1039/c4ra05807k

DO - 10.1039/c4ra05807k

M3 - Article

VL - 4

SP - 37320

EP - 37328

JO - RSC Advances

JF - RSC Advances

SN - 2046-2069

IS - 70

ER -

ID: 709211