Interfacial Compatibility in Microelectronics: Away From the Trial and Error Approach

Tutkimustuotos: Kirja › Book › Scientific › vertaisarvioitu

Alkuperäiskieli	Englanti
Julkaisupaikka	Germany
Kustantaja	Springer
Sivumäärä	217
ISBN (painettu)	978-1-4471-2470-2
Tila	Julkaistu - 2012
OKM-julkaisutyyppi	C1 Kustannettu tieteellinen erillisteos

Tutkimusalat

@book{c8fdb6b62fed4adeb0f1cf7be4c1303c,

title = "Interfacial Compatibility in Microelectronics: Away From the Trial and Error Approach",

keywords = "interfacial compatibility, interfacial compatibility, interfacial compatibility",

author = "Tomi Laurila and Vesa Vuorinen and Markus Turunen and Mattila, {Toni T.} and Mervi Paulasto-Kr{\"o}ckel and Jorma Kivilahti",

year = "2012",

language = "English",

isbn = "978-1-4471-2470-2",

publisher = "Springer",

address = "Germany",

}

TY - BOOK

T1 - Interfacial Compatibility in Microelectronics: Away From the Trial and Error Approach

AU - Laurila, Tomi

AU - Vuorinen, Vesa

AU - Turunen, Markus

AU - Mattila, Toni T.

AU - Paulasto-Kröckel, Mervi

AU - Kivilahti, Jorma

PY - 2012

Y1 - 2012

KW - interfacial compatibility

M3 - Book

SN - 978-1-4471-2470-2

BT - Interfacial Compatibility in Microelectronics: Away From the Trial and Error Approach

PB - Springer

CY - Germany

ER -