Integration of 2D and 3D nanostructure fabrication with wafer-scale microelectronics: Photonic crystals and graphene

Sanna Arpiainen

Integration of 2D and 3D nanostructure fabrication with wafer-scale microelectronics: Photonic crystals and graphene

Julkaisun otsikon käännös: 2D ja 3D -nanorakenteiden integrointi kiekkotason mikroelektroniikkaan: Fotonikiteet ja grafeeni

Sanna Arpiainen

Teknillisen fysiikan laitos

Tutkimustuotos: Doctoral Thesis › Collection of Articles

Abstrakti

Tämä väitöskirja käsittelee 2- ja 3-dimensionaalisten nanorakenteiden integrointia mikroelektroniikan prosesseihin. Sovelluksista keskitytään valokanaviin integroituihin 3D-fotonikiteisiin ja grafeenibioantureihin; molempien valmistuksessa turvaudutaan ohjattuun itsejärjestymiseen, vaikkakin eri mittakaavassa. Aiheita lähestytään valmistuksen ja integroinnin haasteiden näkökulmasta, mutta kirjassa käsitellään sovellusten tulevaisuuden potentiaalia ja näkymiä myös yleisemmällä tasolla. Uusien materiaalien ja rakenteiden tuominen mikroelektroniikan ja fotoniikan sovelluksiin vaatii tyypillisesti niiden integrointia olemassa oleviin sovellusalustoihin. Vakiintuneet valmistusprosessit on kuitenkin optimoitu perinteisesti käytettyjä materiaaleja silmällä pitäen, ja ne vaativat yleensä korkeita lämpötiloja, joissa uusien materiaalien aiheuttama kontaminaatioriski on suuri. Siksi integrointi valmistusprosessin loppuvaiheessa on usein ainoa vaihtoehto, ja haasteeksi muodostuu uusien rakenteiden kohdistaminen valmiisiin elementteihin. Tähän on käytännössä kolme vaihtoehtoa: (i) ohjattu itsejärjestyminen, (ii) korkean tarkkuuden sijoittelu ja (iii) menetelmät, jotka hyödyntävät perinteistä ohutkalvojen kasvatusta ja kuviointia nanorakenteiden valmistukseen. Siinä missä 2D-fotonikiteitä voidaan helposti valmistaa käyttäen kehittyneitä nanolitografiamenetelmiä kuten DUV litografiaa ja etsausta, litografinen lähestymistapa ei välttämättä ole tehokkain menetelmä 3D-fotonikiteiden valmistukseen. Tässä väitöskirjassa esitellään skaalautuva, ohjattu itsejärjestymismenetelmä keinotekoisten opaalien valmistukseen suoraan haluttuihin paikkoihin muiden fotoniikan komponenttien lomaan. Lisäksi määritellään prosessit, joiden avulla opaalit voidaan kääntää piifotonikiteiksi komponentteja vahingoittamatta. Toimivassa piifotonikiteessä on aallonpituusalue, jossa fotonien liike on kielletty, ja tämän alueen olemassaolo todennetaan mittaamalla fotonikiteen läpi kulkevan valon spektri integroituja valokanavia käyttäen. Grafeenin integrointi mikroelektroniikan prosesseihin on periaatteessa yksinkertaista, sillä materiaali on tasaista kalvoa, jota voidaan prosessoida kuten perinteisiä ohutkalvoja, kunhan se onnistutaan saamaan halutulle pinnalle. Tässä väitöskirjassa esitellään erilaisia menetelmiä, joiden tarkoituksena on ollut tuottaa korkealuokkaista grafeenia suuressa mittakaavassa erilaisille pinnoille. Lisäksi esitellään mm. grafiitin mekaaninen atomitasojen suuntainen viipalointi "askella ja leimaa" -painomenetelmällä sekä grafeenin nopea kaasufaasikasvatus metallin pinnalle ja siirto halutulle alustalle, joka on tällä hetkellä lupaavin menetelmä laaja-alaiseen grafeenin tuotantoon. Fysiikan ja kemian näkökulmasta grafeeni ei kuitenkaan ole tyypillinen ohutkalvo. Materiaalin atomäärisen ohuuden takia ympäristöllä on merkittävä vaikutus grafeenin sähköisiin ominaisuuksiin. Tämä on muistettava huomioida komponenttien valmistuksessa ja suunnittelussa, mutta se tekee grafeenista myös erityisen herkän sähköisen anturimateriaalin. Grafeeniin perustuvien antureiden suurin haaste on erilaisten kohdeaineiden tunnistaminen. Tässä väitöskirjassa käsitellään grafeenitransistorien integrointia itsejärjestyvien bioreseptorien kanssa, jolla tavoin saavutetaan herkkä ja valikoiva bioanturi.

Julkaisun otsikon käännös	2D ja 3D -nanorakenteiden integrointi kiekkotason mikroelektroniikkaan: Fotonikiteet ja grafeeni
Alkuperäiskieli	Englanti
Pätevyys	Tohtorintutkinto
Myöntävä instituutio	Aalto-yliopisto
Ohjaaja	Liljeroth, Peter, Vastuuprofessori Imhof, Arnout, Ohjaaja, Ulkoinen henkilö Sun, Jie, Ohjaaja, Ulkoinen henkilö
Kustantaja	VTT Technical Research Centre of Finland
Painoksen ISBN	978-951-38-8324-9
Sähköinen ISBN	978-951-38-8325-6
Tila	Julkaistu - 2015
OKM-julkaisutyyppi	G5 Artikkeliväitöskirja

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http://urn.fi/URN:ISBN:978-951-38-8325-6Lisenssi: Määrittelemätön

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@phdthesis{abd61184e57b480995d72dc164bcfec7,

title = "Integration of 2D and 3D nanostructure fabrication with wafer-scale microelectronics: Photonic crystals and graphene",

abstract = "This Thesis considers different aspects of heterogeneous integration of 2- and 3-dimensional nanostructures with today's microelectronics process flow. The applications in the main focus are integrated 3D photonic crystals on a photonic chip and graphene biosensors, both exploiting directed self-assembly but at different length scales. View point is from the fabrication and integration challenges, but the future prospects of the selected fields of applications are also reviewed.Utilization of new materials and structures in microelectronics and photonics applications typically requires integration with the existing platforms. The fabrication processes are optimized for the established materials and generally require both high thermal budget and elemental purity to avoid contamination, thus the novel elements need to be integrated at the back-end phase and aligned with the pre-existing structures on the substrate. For that, there are basically three alternatives; (i) directed self-assembly, (ii) high precision placement and (iii) methods exploiting thin film growth and lithographic definition of the nanostructures. Whereas the 2D photonic crystals can be conveniently fabricated with advanced nanolithographic methods such as deep-UV lithography and etching, for the 3D photonic crystals the lithographic approach may not be the most efficient method. This Thesis presents a scalable directed self-assembly method for the fabrication of artificial opal photonic crystals on a photonic chip and defines the processing steps required for the inversion of the opal with silicon to obtain full photonic band gap without damaging the underlying chip. The existence of the full photonic band gap in the inverted silicon photonic crystal is demonstrated by measurements via the integrated waveguides. The integration of graphene with microelectronics processes is, in principle, simple due to the sheet-like structure of the material. The atomically thin 2D crystal can be processed in a manner similar to traditional thin films, as soon as graphene is on the substrate. This Thesis presents different methods aiming for scalable production of high quality graphene on different substrates, ranging from mechanical exfoliation based on step-and-stamp printing to rapid chemical vapour deposition with subsequent thin film transfer, which is the most promising method for large area graphene production. From the physical and chemical point of view, however, graphene is not a traditional thin film. Due to the single atom thickness, environment has a significant influence on the electronic properties of graphene. This has to be taken into account in the processing and design of graphene devices, but it also provides means to highly efficient sensing applications. The key issue in graphene based sensors is in the specific recognition, which has to be introduced by functionalization. This Thesis addresses the functionalization of graphene field-effect-transistors with self-assembled bio-receptors, utilizing non-covalent hydrophobic interactions between graphene and hydrophobin proteins.",

keywords = "integration, graphene, photonic crystals, opals, biosensing, integration, graphene, photonic crystals, opals, biosensing",

author = "Sanna Arpiainen",

year = "2015",

language = "English",

isbn = "978-951-38-8324-9",

series = "VTT Science",

publisher = "VTT Technical Research Centre of Finland",

number = "100",

address = "Finland",

school = "Aalto University",

}

TY - BOOK

T1 - Integration of 2D and 3D nanostructure fabrication with wafer-scale microelectronics: Photonic crystals and graphene

AU - Arpiainen, Sanna

PY - 2015

Y1 - 2015

N2 - This Thesis considers different aspects of heterogeneous integration of 2- and 3-dimensional nanostructures with today's microelectronics process flow. The applications in the main focus are integrated 3D photonic crystals on a photonic chip and graphene biosensors, both exploiting directed self-assembly but at different length scales. View point is from the fabrication and integration challenges, but the future prospects of the selected fields of applications are also reviewed.Utilization of new materials and structures in microelectronics and photonics applications typically requires integration with the existing platforms. The fabrication processes are optimized for the established materials and generally require both high thermal budget and elemental purity to avoid contamination, thus the novel elements need to be integrated at the back-end phase and aligned with the pre-existing structures on the substrate. For that, there are basically three alternatives; (i) directed self-assembly, (ii) high precision placement and (iii) methods exploiting thin film growth and lithographic definition of the nanostructures. Whereas the 2D photonic crystals can be conveniently fabricated with advanced nanolithographic methods such as deep-UV lithography and etching, for the 3D photonic crystals the lithographic approach may not be the most efficient method. This Thesis presents a scalable directed self-assembly method for the fabrication of artificial opal photonic crystals on a photonic chip and defines the processing steps required for the inversion of the opal with silicon to obtain full photonic band gap without damaging the underlying chip. The existence of the full photonic band gap in the inverted silicon photonic crystal is demonstrated by measurements via the integrated waveguides. The integration of graphene with microelectronics processes is, in principle, simple due to the sheet-like structure of the material. The atomically thin 2D crystal can be processed in a manner similar to traditional thin films, as soon as graphene is on the substrate. This Thesis presents different methods aiming for scalable production of high quality graphene on different substrates, ranging from mechanical exfoliation based on step-and-stamp printing to rapid chemical vapour deposition with subsequent thin film transfer, which is the most promising method for large area graphene production. From the physical and chemical point of view, however, graphene is not a traditional thin film. Due to the single atom thickness, environment has a significant influence on the electronic properties of graphene. This has to be taken into account in the processing and design of graphene devices, but it also provides means to highly efficient sensing applications. The key issue in graphene based sensors is in the specific recognition, which has to be introduced by functionalization. This Thesis addresses the functionalization of graphene field-effect-transistors with self-assembled bio-receptors, utilizing non-covalent hydrophobic interactions between graphene and hydrophobin proteins.

AB - This Thesis considers different aspects of heterogeneous integration of 2- and 3-dimensional nanostructures with today's microelectronics process flow. The applications in the main focus are integrated 3D photonic crystals on a photonic chip and graphene biosensors, both exploiting directed self-assembly but at different length scales. View point is from the fabrication and integration challenges, but the future prospects of the selected fields of applications are also reviewed.Utilization of new materials and structures in microelectronics and photonics applications typically requires integration with the existing platforms. The fabrication processes are optimized for the established materials and generally require both high thermal budget and elemental purity to avoid contamination, thus the novel elements need to be integrated at the back-end phase and aligned with the pre-existing structures on the substrate. For that, there are basically three alternatives; (i) directed self-assembly, (ii) high precision placement and (iii) methods exploiting thin film growth and lithographic definition of the nanostructures. Whereas the 2D photonic crystals can be conveniently fabricated with advanced nanolithographic methods such as deep-UV lithography and etching, for the 3D photonic crystals the lithographic approach may not be the most efficient method. This Thesis presents a scalable directed self-assembly method for the fabrication of artificial opal photonic crystals on a photonic chip and defines the processing steps required for the inversion of the opal with silicon to obtain full photonic band gap without damaging the underlying chip. The existence of the full photonic band gap in the inverted silicon photonic crystal is demonstrated by measurements via the integrated waveguides. The integration of graphene with microelectronics processes is, in principle, simple due to the sheet-like structure of the material. The atomically thin 2D crystal can be processed in a manner similar to traditional thin films, as soon as graphene is on the substrate. This Thesis presents different methods aiming for scalable production of high quality graphene on different substrates, ranging from mechanical exfoliation based on step-and-stamp printing to rapid chemical vapour deposition with subsequent thin film transfer, which is the most promising method for large area graphene production. From the physical and chemical point of view, however, graphene is not a traditional thin film. Due to the single atom thickness, environment has a significant influence on the electronic properties of graphene. This has to be taken into account in the processing and design of graphene devices, but it also provides means to highly efficient sensing applications. The key issue in graphene based sensors is in the specific recognition, which has to be introduced by functionalization. This Thesis addresses the functionalization of graphene field-effect-transistors with self-assembled bio-receptors, utilizing non-covalent hydrophobic interactions between graphene and hydrophobin proteins.

KW - integration

KW - graphene

KW - photonic crystals

KW - opals

KW - biosensing

KW - integration

KW - graphene

KW - photonic crystals

KW - opals

KW - biosensing

M3 - Doctoral Thesis

SN - 978-951-38-8324-9

T3 - VTT Science

PB - VTT Technical Research Centre of Finland

ER -

Integration of 2D and 3D nanostructure fabrication with wafer-scale microelectronics: Photonic crystals and graphene

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