Inhibition of Silica Nanoparticle Adhesion to Poly(vinyl alcohol) Surfaces by Ammonia-Mediated Hydration: Implications for Effective Post-Chemical-Mechanical Planarization Cleaning

Takahiko Ikarashi, Takumi Yoshino, Naoki Nakajima, Kazuki Miyata, Keisuke Miyazawa, Ygor Morais Jaques, Adam S. Foster, Megumi Uno, Chikako Takatoh, Takeshi Fukuma^*

^*Tämän työn vastaava kirjoittaja