Influence of surface topography on depth profiles obtained by Rutherford backscattering spectrometry

J. Slotte; A. Laakso; Tommy Ahlgren; Eero Rauhala; R. Salonen; J. Räisänen; A. Simon; I. Uzonyi; A.Z. Kiss; E. Somorjai

doi:10.1063/1.371835

Influence of surface topography on depth profiles obtained by Rutherford backscattering spectrometry

J. Slotte, A. Laakso, Tommy Ahlgren, Eero Rauhala, R. Salonen, J. Räisänen, A. Simon, I. Uzonyi, A.Z. Kiss, E. Somorjai

Tutkimustuotos: Lehtiartikkeli › Article › Scientific › vertaisarvioitu

Abstrakti

A method for determining correct depth profiles from samples with rough surfaces is presented. The method combines Rutherford backscattering spectrometry with atomic force microscopy. The topographical information obtained by atomic force microscopy is used to calculate the effect of the surface roughness on the backscattering spectrum. As an example, annealed Au/ZnSe heterostructures are studied. Gold grains were observed on the surfaces of the annealed samples. The annealing also caused diffusion of gold into the ZnSe. Backscattering spectra of the samples were measured with a 2 MeV 4He+ ion beam. A scanning nuclear microprobe was used to verify the results by measuring backscattering from grains and from areas of the samples where no grains had been formed during annealing.

Alkuperäiskieli	Englanti
Sivut	140-143
Julkaisu	Journal of Applied Physics
Vuosikerta	87
Numero	1
DOI - pysyväislinkit	https://doi.org/10.1063/1.371835
Tila	Julkaistu - 2000
OKM-julkaisutyyppi	A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä

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10.1063/1.371835

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title = "Influence of surface topography on depth profiles obtained by Rutherford backscattering spectrometry",

abstract = "A method for determining correct depth profiles from samples with rough surfaces is presented. The method combines Rutherford backscattering spectrometry with atomic force microscopy. The topographical information obtained by atomic force microscopy is used to calculate the effect of the surface roughness on the backscattering spectrum. As an example, annealed Au/ZnSe heterostructures are studied. Gold grains were observed on the surfaces of the annealed samples. The annealing also caused diffusion of gold into the ZnSe. Backscattering spectra of the samples were measured with a 2 MeV 4He+ ion beam. A scanning nuclear microprobe was used to verify the results by measuring backscattering from grains and from areas of the samples where no grains had been formed during annealing.",

author = "J. Slotte and A. Laakso and Tommy Ahlgren and Eero Rauhala and R. Salonen and J. R{\"a}is{\"a}nen and A. Simon and I. Uzonyi and A.Z. Kiss and E. Somorjai",

year = "2000",

doi = "10.1063/1.371835",

language = "English",

volume = "87",

pages = "140--143",

journal = "Journal of Applied Physics",

issn = "1089-7550",

publisher = "American Institute of Physics",

number = "1",

}

TY - JOUR

T1 - Influence of surface topography on depth profiles obtained by Rutherford backscattering spectrometry

AU - Slotte, J.

AU - Laakso, A.

AU - Ahlgren, Tommy

AU - Rauhala, Eero

AU - Salonen, R.

AU - Räisänen, J.

AU - Simon, A.

AU - Uzonyi, I.

AU - Kiss, A.Z.

AU - Somorjai, E.

PY - 2000

Y1 - 2000

N2 - A method for determining correct depth profiles from samples with rough surfaces is presented. The method combines Rutherford backscattering spectrometry with atomic force microscopy. The topographical information obtained by atomic force microscopy is used to calculate the effect of the surface roughness on the backscattering spectrum. As an example, annealed Au/ZnSe heterostructures are studied. Gold grains were observed on the surfaces of the annealed samples. The annealing also caused diffusion of gold into the ZnSe. Backscattering spectra of the samples were measured with a 2 MeV 4He+ ion beam. A scanning nuclear microprobe was used to verify the results by measuring backscattering from grains and from areas of the samples where no grains had been formed during annealing.

AB - A method for determining correct depth profiles from samples with rough surfaces is presented. The method combines Rutherford backscattering spectrometry with atomic force microscopy. The topographical information obtained by atomic force microscopy is used to calculate the effect of the surface roughness on the backscattering spectrum. As an example, annealed Au/ZnSe heterostructures are studied. Gold grains were observed on the surfaces of the annealed samples. The annealing also caused diffusion of gold into the ZnSe. Backscattering spectra of the samples were measured with a 2 MeV 4He+ ion beam. A scanning nuclear microprobe was used to verify the results by measuring backscattering from grains and from areas of the samples where no grains had been formed during annealing.

U2 - 10.1063/1.371835

DO - 10.1063/1.371835

M3 - Article

SN - 1089-7550

VL - 87

SP - 140

EP - 143

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 1

ER -

Influence of surface topography on depth profiles obtained by Rutherford backscattering spectrometry

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