@article{95257880fa96460f8055e33ec2c7c9b2,
title = "In-Plane AlN-based Actuator: Toward a New Generation of Piezoelectric MEMS",
abstract = "A novel design that utilizes aluminum nitride (AlN) piezoelectric thin films deposited on vertical surfaces for lateral motion and sensing is a step toward emerging multi-axial microelectromechanical systems (MEMS). This work demonstrates the fabrication process and potential applications of an in-plane moving piezoactuator. The actuator is excited using the inverse piezoelectric effect of the AlN thin film grown on the vertical surfaces of a Si cantilever. Lateral motion of the actuator is enabled when a voltage is applied between the top and bottom electrodes of the device, which are highly doped Si and titanium nitride thin film. The motion of the actuator is captured using scanning electron microscope.",
keywords = "aluminum nitride, in-plane motion, MEMS, piezoelectric, thin films",
author = "Kristina Bespalova and Tarmo Nieminen and Artem Gabrelian and Glenn Ross and Mervi Paulasto-Kr{\"o}ckel",
note = "Funding Information: The authors acknowledge Ms. Heli Sepp{\"a}nen for her help with ALD, and Dr. Victor Ovchinnikov for his help with dry etching processing. This work has been carried out as part of ECSEL18 Project NewControl, which received funding within the Electronic Components and Systems For European Leadership Joint Undertaking (ESCEL JU) in collaboration with the European Union's Horizon2020 Framework Programme and National Authorities, under grant agreement no. 826653‐2. The authors would like to acknowledge the Innovation Funding Agency Business Finland for their financial support. The authors acknowledge the provision of facilities and technical support of Aalto University at OtaNano Nanomicroscopy Center (Aalto‐NMC). K.B. acknowledges support from the HPY Research Foundation, and the Foundation of Electronics Engineers (Elektroniikkainsin{\"o}{\"o}rien S{\"a}{\"a}ti{\"o}). Publisher Copyright: {\textcopyright} 2023 The Authors. Advanced Electronic Materials published by Wiley-VCH GmbH. | openaire: EC/H2020/826653/EU//NewControl",
year = "2023",
month = aug,
doi = "10.1002/aelm.202300015",
language = "English",
volume = "9",
journal = "Advanced Electronic Materials",
issn = "2199-160X",
publisher = "Wiley-VCH Verlag",
number = "8",
}