@techreport{b2e85d329a3d4719ae908ec214139004,
title = "Hydrophilic patterning of hydrophobic zinc-oxide films using UV excimer laser",
keywords = "atomic layer deposition (ALD), patterning, UV laser, wettability, zinc oxide, atomic layer deposition (ALD), patterning, UV laser, wettability, zinc oxide, atomic layer deposition (ALD), patterning, UV laser, wettability, zinc oxide",
author = "Ville Kekkonen and Jari Malm and Elina Sahramo and Antti Hakola and Timo Kajava and Maarit Karppinen and Robin Ras",
year = "2008",
language = "English",
series = "XLII Annual Conference of the Finnish Physical Society, Turku 27.-29.3.2008",
pages = "138",
type = "WorkingPaper",
}