Hybrid microassembly combining laser die transfer and capillary self-alignment

Bo Chang, Mikko Koverola, Zhenghao Ge, Quan Zhou

Tutkimustuotos: Artikkeli kirjassa/konferenssijulkaisussaConference contributionScientificvertaisarvioitu

2 Sitaatiot (Scopus)

Abstrakti

Laser die transfer technique provides an efficient solution for fast transportation of microchips in microassembly. Capillary self-alignment is able to achieve parallel and high-accuracy alignment of microchips on receptor sites. In this paper, we propose a new hybrid microassembly strategy, which combines laser die transfer and capillary self-alignment techniques. The laser die transfer technique was used for the coarse positioning of microchips and the capillary self-assembly technique was applied to achieve high-accuracy alignment. A low-power and low-cost laser device was investigated in laser die transfer process and hydrophilic/superhydrophobic patterned surfaces were fabricated and served as receptor sites. Microscopic droplets were introduced as the media for capillary self-alignment. The results show that the microchip can be selectively released and self-aligned with the corresponding receptor site. The proposed method could be useful for high-throughput, high-accuracy and fully-automatic assembly in construction of miniature devices.
AlkuperäiskieliEnglanti
Otsikko2017 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)
KustantajaIEEE
Sivumäärä4
ISBN (elektroninen) 978-1-5386-0346-8
ISBN (painettu)978-1-5386-0347-5
DOI - pysyväislinkit
TilaJulkaistu - 8 elokuuta 2017
OKM-julkaisutyyppiA4 Artikkeli konferenssijulkaisuussa
TapahtumaInternational Conference on Manipulation, Automation and Robotics at Small Scales - University of Montreal, Montreal, Kanada
Kesto: 17 heinäkuuta 201721 heinäkuuta 2017
http://marss-conference.org/

Conference

ConferenceInternational Conference on Manipulation, Automation and Robotics at Small Scales
LyhennettäMARSS
Maa/AlueKanada
KaupunkiMontreal
Ajanjakso17/07/201721/07/2017
www-osoite

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