@inproceedings{ba862a8c574543cc956136dc3f523a46,
title = "High-Q micromechanical silicon oscillators",
keywords = "high-q, micromechanics, silicon oscillators, high-q, micromechanics, silicon oscillators, high-q, micromechanics, silicon oscillators",
author = "K. Nera and O. Hahtela and M. Kujala and K. Lahti and T. Lamminm{\"a}ki and K. Ruokonen and V. Voipio and I. Tittonen",
year = "1999",
language = "English",
pages = "616",
booktitle = "XXII International Conference on Low Temperature Physics, Helsinki, Finland, August 4-11, 1999",
}