High-Q micromechanical length extensional mode resonator

Pekka Rantakari; Mika Koskenvuori; Tuomas Lamminmäki; Ilkka Tittonen

High-Q micromechanical length extensional mode resonator

Pekka Rantakari, Mika Koskenvuori, Tuomas Lamminmäki, Ilkka Tittonen

Tutkimustuotos: Artikkeli kirjassa/konferenssijulkaisussa › Conference article in proceedings › Scientific › vertaisarvioitu

Alkuperäiskieli	Englanti
Otsikko	Proceedings of the XXXVI annual conference of the Finnish Physical Society
Toimittajat	Jani Tervo, Pertti Pääkkönen, Markku Kuittinen
Kustantaja	University of Joensuu
ISBN (painettu)	952-458-110-8
Tila	Julkaistu - 2002
OKM-julkaisutyyppi	A4 Artikkeli konferenssijulkaisussa
Tapahtuma	Physics Days: Annual Meeting of the Finnish Physical Society - Joensuu, Suomi Kesto: 14 maalisk. 2002 → 16 maalisk. 2002 Konferenssinumero: 36

Julkaisusarja

Nimi	XXXVI Annual Conference of the Finnish Physical Society, Joensuu, Finland, March 14-16, 2002

Nimi	Selected papers / University of Joensuu, Department of Physics
Kustantaja	University of Joensuu
Numero	7
ISSN (painettu)	1236-0376

Conference

Conference	Physics Days
Maa/Alue	Suomi
Kaupunki	Joensuu
Ajanjakso	14/03/2002 → 16/03/2002

Tutkimusalat

High Q-value
resonator
RF-MEMES

Siteeraa tätä

Rantakari, P., Koskenvuori, M., Lamminmäki, T., & Tittonen, I. (2002). High-Q micromechanical length extensional mode resonator. teoksessa J. Tervo, P. Pääkkönen, & M. Kuittinen (Toimittajat), Proceedings of the XXXVI annual conference of the Finnish Physical Society (XXXVI Annual Conference of the Finnish Physical Society, Joensuu, Finland, March 14-16, 2002), (Selected papers / University of Joensuu, Department of Physics; Nro 7). University of Joensuu.

Rantakari, Pekka ; Koskenvuori, Mika ; Lamminmäki, Tuomas et al. / High-Q micromechanical length extensional mode resonator. Proceedings of the XXXVI annual conference of the Finnish Physical Society. Toimittaja / Jani Tervo ; Pertti Pääkkönen ; Markku Kuittinen. University of Joensuu, 2002. (XXXVI Annual Conference of the Finnish Physical Society, Joensuu, Finland, March 14-16, 2002). (Selected papers / University of Joensuu, Department of Physics; 7).

@inproceedings{b17540692f84443892e94c550c090843,

title = "High-Q micromechanical length extensional mode resonator",

keywords = "High Q-value, resonator, RF-MEMES, High Q-value, resonator, RF-MEMES, High Q-value, resonator, RF-MEMES",

author = "Pekka Rantakari and Mika Koskenvuori and Tuomas Lamminm{\"a}ki and Ilkka Tittonen",

year = "2002",

language = "English",

isbn = "952-458-110-8",

series = "XXXVI Annual Conference of the Finnish Physical Society, Joensuu, Finland, March 14-16, 2002",

publisher = "University of Joensuu",

editor = "Jani Tervo and P{\"a}{\"a}kk{\"o}nen, {Pertti } and Markku Kuittinen",

booktitle = "Proceedings of the XXXVI annual conference of the Finnish Physical Society",

address = "Finland",

note = "Physics Days : Annual Meeting of the Finnish Physical Society ; Conference date: 14-03-2002 Through 16-03-2002",

}

Rantakari, P, Koskenvuori, M, Lamminmäki, T & Tittonen, I 2002, High-Q micromechanical length extensional mode resonator. julkaisussa J Tervo, P Pääkkönen & M Kuittinen (toim), Proceedings of the XXXVI annual conference of the Finnish Physical Society. XXXVI Annual Conference of the Finnish Physical Society, Joensuu, Finland, March 14-16, 2002, Selected papers / University of Joensuu, Department of Physics, Nro 7, University of Joensuu, Physics Days, Joensuu, Suomi, 14/03/2002.

High-Q micromechanical length extensional mode resonator. / Rantakari, Pekka; Koskenvuori, Mika; Lamminmäki, Tuomas et al.
Proceedings of the XXXVI annual conference of the Finnish Physical Society. toim. / Jani Tervo; Pertti Pääkkönen; Markku Kuittinen. University of Joensuu, 2002. (XXXVI Annual Conference of the Finnish Physical Society, Joensuu, Finland, March 14-16, 2002), (Selected papers / University of Joensuu, Department of Physics; Nro 7).

Tutkimustuotos: Artikkeli kirjassa/konferenssijulkaisussa › Conference article in proceedings › Scientific › vertaisarvioitu

TY - GEN

T1 - High-Q micromechanical length extensional mode resonator

AU - Rantakari, Pekka

AU - Koskenvuori, Mika

AU - Lamminmäki, Tuomas

AU - Tittonen, Ilkka

N1 - Conference code: 36

PY - 2002

Y1 - 2002

KW - High Q-value

KW - resonator

KW - RF-MEMES

KW - High Q-value

KW - resonator

KW - RF-MEMES

KW - High Q-value

KW - resonator

KW - RF-MEMES

M3 - Conference article in proceedings

SN - 952-458-110-8

T3 - XXXVI Annual Conference of the Finnish Physical Society, Joensuu, Finland, March 14-16, 2002

BT - Proceedings of the XXXVI annual conference of the Finnish Physical Society

A2 - Tervo, Jani

A2 - Pääkkönen, Pertti

A2 - Kuittinen, Markku

PB - University of Joensuu

T2 - Physics Days

Y2 - 14 March 2002 through 16 March 2002

ER -

Rantakari P, Koskenvuori M, Lamminmäki T, Tittonen I. High-Q micromechanical length extensional mode resonator. julkaisussa Tervo J, Pääkkönen P, Kuittinen M, toimittajat, Proceedings of the XXXVI annual conference of the Finnish Physical Society. University of Joensuu. 2002. (XXXVI Annual Conference of the Finnish Physical Society, Joensuu, Finland, March 14-16, 2002). (Selected papers / University of Joensuu, Department of Physics; 7).