@article{73c2b384cec7476db2181417a35f06f3,
title = "He Implantation Induced Nanovoids in Crystalline Si",
keywords = "He implantation, positron, Si, He implantation, positron, Si, He implantation, positron, Si",
author = "Simo Kilpel{\"a}inen and Kimmo Kuitunen and Jonatan Slotte and Filip Tuomisto and E. Bruno and S. Mirabella and F. Priolo",
year = "2009",
month = mar,
day = "15",
doi = "10.1016/j.mseb.2008.12.010",
language = "English",
volume = "159-160",
pages = "164--167",
journal = "Journal of Materials Science and Engineering B",
issn = "2161-6221",
publisher = "David Publishing Co., Inc.",
}