Handbook of silicon based MEMS materials and technologies

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@book{d263620d37624e2caa4f85138aaae307,

title = "Handbook of silicon based MEMS materials and technologies",

keywords = "materials, MEMS, silicon",

author = "Markku Tilli and Teruaki Motooka and Veli-Matti Airaksinen and Sami Franssila and Mervi Paulasto-Kr{\"o}ckel and Veikko Lindroos",

year = "2015",

language = "English",

isbn = "978-0-323-29965-7",

publisher = "Elsevier",

address = "Netherlands",

edition = "2nd edition",

}

TY - BOOK

T1 - Handbook of silicon based MEMS materials and technologies

AU - Tilli, Markku

AU - Motooka, Teruaki

AU - Airaksinen, Veli-Matti

AU - Franssila, Sami

AU - Paulasto-Kröckel, Mervi

AU - Lindroos, Veikko

PY - 2015

Y1 - 2015

KW - materials

KW - MEMS

KW - silicon

M3 - Book

SN - 978-0-323-29965-7

BT - Handbook of silicon based MEMS materials and technologies

PB - Elsevier

CY - London

ER -