@techreport{22ddbf60b86a4666a5e74aee86c16b1d,
title = "Growth of CuS thin films by atomic layer epitaxy as material for gas sensors",
keywords = "ammonia, atomic layer epitaxy, porous silicon, solid state gas sensor, ammonia, atomic layer epitaxy, porous silicon, solid state gas sensor, ammonia, atomic layer epitaxy, porous silicon, solid state gas sensor",
author = "J. Johansson and J. Kostamo and L. Niinist{\"o}",
year = "2000",
language = "English",
series = "Finnish Chemical Congress and Exhibition, Helsinki, Finland, November 15-17., 2000.",
publisher = "The Association of Finnish Chemical Societies",
pages = "31",
type = "WorkingPaper",
institution = "The Association of Finnish Chemical Societies",
}