Grass-like Alumina with Low Refractive Index for Scalable, Broadband, Omnidirectional Antireflection Coatings on Glass Using Atomic Layer Deposition

Tutkimustuotos: Lehtiartikkelivertaisarvioitu

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Bibtex - Lataa

@article{93f35e68694a46499d639ad038b00fc3,
title = "Grass-like Alumina with Low Refractive Index for Scalable, Broadband, Omnidirectional Antireflection Coatings on Glass Using Atomic Layer Deposition",
abstract = "We present a new type of nanoporous antireflection (AR) coating based on grass-like alumina with a graded refractive index profile. The grass-like alumina AR coating is fabricated using atomic layer deposition (ALD) of alumina and immersion in heated deionized water. Optical transmittance of 99.5{\%} at 500 nm was achieved with average transmittance of 99.0{\%} in the range of 350–800 nm at normal incidence for double-sided coated glass. Angular spectral transmittance (0–80°) of the double-sided AR coated glass was also measured in the range of 350–800 nm and found to have mean spectral transmittance of 94.0{\%} at 60°, 85.0{\%} at 70°, and 53.1{\%} at 80° angles of incidence, respectively. The grass-like alumina AR coating is suitable for mass production with the presented technique: even hundreds of optical components can be coated in parallel. Furthermore, as an ALD-based technique, the coating can be deposited conformally on surfaces with extreme topography, unlike many spin-coating, physical vapor deposition or glancing angle deposition-based coatings used today.",
keywords = "ALD, atomic layer deposition, alumina, antireflection, graded index, broadband, omnidirectional, nanoporous",
author = "Christoffer Kauppinen and Kirill Isakov and Markku Sopanen",
year = "2017",
month = "4",
day = "11",
doi = "10.1021/acsami.7b01733",
language = "English",
volume = "9",
pages = "15038−15043",
journal = "ACS Applied Materials and Interfaces",
issn = "1944-8244",
publisher = "AMERICAN CHEMICAL SOCIETY",
number = "17",

}

RIS - Lataa

TY - JOUR

T1 - Grass-like Alumina with Low Refractive Index for Scalable, Broadband, Omnidirectional Antireflection Coatings on Glass Using Atomic Layer Deposition

AU - Kauppinen, Christoffer

AU - Isakov, Kirill

AU - Sopanen, Markku

PY - 2017/4/11

Y1 - 2017/4/11

N2 - We present a new type of nanoporous antireflection (AR) coating based on grass-like alumina with a graded refractive index profile. The grass-like alumina AR coating is fabricated using atomic layer deposition (ALD) of alumina and immersion in heated deionized water. Optical transmittance of 99.5% at 500 nm was achieved with average transmittance of 99.0% in the range of 350–800 nm at normal incidence for double-sided coated glass. Angular spectral transmittance (0–80°) of the double-sided AR coated glass was also measured in the range of 350–800 nm and found to have mean spectral transmittance of 94.0% at 60°, 85.0% at 70°, and 53.1% at 80° angles of incidence, respectively. The grass-like alumina AR coating is suitable for mass production with the presented technique: even hundreds of optical components can be coated in parallel. Furthermore, as an ALD-based technique, the coating can be deposited conformally on surfaces with extreme topography, unlike many spin-coating, physical vapor deposition or glancing angle deposition-based coatings used today.

AB - We present a new type of nanoporous antireflection (AR) coating based on grass-like alumina with a graded refractive index profile. The grass-like alumina AR coating is fabricated using atomic layer deposition (ALD) of alumina and immersion in heated deionized water. Optical transmittance of 99.5% at 500 nm was achieved with average transmittance of 99.0% in the range of 350–800 nm at normal incidence for double-sided coated glass. Angular spectral transmittance (0–80°) of the double-sided AR coated glass was also measured in the range of 350–800 nm and found to have mean spectral transmittance of 94.0% at 60°, 85.0% at 70°, and 53.1% at 80° angles of incidence, respectively. The grass-like alumina AR coating is suitable for mass production with the presented technique: even hundreds of optical components can be coated in parallel. Furthermore, as an ALD-based technique, the coating can be deposited conformally on surfaces with extreme topography, unlike many spin-coating, physical vapor deposition or glancing angle deposition-based coatings used today.

KW - ALD

KW - atomic layer deposition

KW - alumina

KW - antireflection

KW - graded index

KW - broadband

KW - omnidirectional

KW - nanoporous

U2 - 10.1021/acsami.7b01733

DO - 10.1021/acsami.7b01733

M3 - Article

VL - 9

SP - 15038−15043

JO - ACS Applied Materials and Interfaces

JF - ACS Applied Materials and Interfaces

SN - 1944-8244

IS - 17

ER -

ID: 12866976