Gentle Patterning Approaches toward Compatibility with Bio-Organic Materials and Their Environmental Aspects

Artem K. Grebenko*, Konstantin A. Motovilov, Anton V. Bubis, Albert G. Nasibulin*

*Tämän työn vastaava kirjoittaja

Tutkimustuotos: LehtiartikkeliReview ArticleScientificvertaisarvioitu

3 Lataukset (Pure)

Abstrakti

Advances in material science, bioelectronic, and implantable medicine combined with recent requests for eco-friendly materials and technologies inevitably formulate new challenges for nano- and micropatterning techniques. Overall, the importance of creating micro- and nanostructures is motivated by a large manifold of fundamental and applied properties accessible only at the nanoscale. Lithography is a crucial family of fabrication methods to create prototypes and produce devices on an industrial scale. The pure trend in the miniaturization of critical electronic semiconducting components has been recently enhanced by implementing bio-organic systems in electronics. So far, significant efforts have been made to find novel lithographic approaches and develop old ones to reach compatibility with delicate bio-organic systems and minimize the impact on the environment. Herein, such delicate materials and sophisticated patterning techniques are briefly reviewed.

AlkuperäiskieliEnglanti
Artikkeli2200476
Sivumäärä23
JulkaisuSmall
Vuosikerta18
Numero22
Varhainen verkossa julkaisun päivämäärä22 maalisk. 2022
DOI - pysyväislinkit
TilaJulkaistu - 2 kesäk. 2022
OKM-julkaisutyyppiA2 Arvio tiedejulkaisuussa (artikkeli)

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