@article{bf9a654445cb4f33b9bb2394de2ce645,
title = "Formation of Gaseous Intermediates in Titanium(IV) Chloride Plasma Oxidation",
keywords = "chain reaction mechanism, chemical synthesis, oxidation of titanium(IV) chloride, RF plasma, chain reaction mechanism, chemical synthesis, oxidation of titanium(IV) chloride, RF plasma, chain reaction mechanism, chemical synthesis, oxidation of titanium(IV) chloride, RF plasma",
author = "B. Karlemo and P. Koukkari and J. Paloniemi",
year = "1996",
language = "English",
volume = "16",
pages = "59--77",
journal = "Plasma Chemistry and Plasma Processing",
issn = "1572-8986",
publisher = "Springer",
number = "1",
}