@article{cd30a7c016b24691bb2162e504d8aa48,
title = "Fitness function and nonunique solutions in x-ray reflectivity curve fitting: crosserror between surface roughness and mass density",
keywords = "atomic layer deposition, crowwerror, fitness landscape, x-ray reflectivity, atomic layer deposition, crowwerror, fitness landscape, x-ray reflectivity, atomic layer deposition, crowwerror, fitness landscape, x-ray reflectivity",
author = "Jouni Tiilikainen and Vesa Bosund and Marco Mattila and Teppo Hakkarainen and Jaakko Sormunen and Harri Lipsanen",
year = "2007",
doi = "10.1088/0022-3727/40/14/023",
language = "English",
volume = "40",
pages = "4259--4263",
journal = "Journal of Physics D: Applied Physics",
issn = "0022-3727",
publisher = "Institute of Physics Publishing ",
number = "14",
}