@techreport{1b81945a90a84e979ef985873a6851de,
title = "Finite element method simulations on micromechanical sensors",
keywords = "micromechanics, sensors, simulations, micromechanics, sensors, simulations, micromechanics, sensors, simulations",
author = "K. Ruokonen and T. Lamminm{\"a}ki and K. Nera and V. Voipio and I. Tittonen",
year = "1999",
language = "English",
series = "XXXIII Annual Conference of the Finnish Physical Society, Turku, Finland, March 4-6, 1999",
pages = "paper 10.18",
type = "WorkingPaper",
}