@inproceedings{38036f3615244a3fb6dcbc964fa1cc77,
title = "Fast Kelvin-probe Type Method for Measuring the Built-in voltage Inside Clodes Cavity MEMS-devices",
keywords = "built-in voltage, contact potential, Kelvin-probe, micromechanics, stability, vibrating capacitor, built-in voltage, contact potential, Kelvin-probe, micromechanics, stability, vibrating capacitor, built-in voltage, contact potential, Kelvin-probe, micromechanics, stability, vibrating capacitor",
author = "Mika Koskenvuori and V-P Rytk{\"o}nen and Pekka Rantakari and Ilkka Tittonen",
year = "2007",
language = "English",
pages = "122--125",
booktitle = "ICMAT 2007, Singapore, 1-6 July 2007",
}