@article{9c7d3cc197224dfebb1ed789724e0c72,
title = "Fabrication of Ultrathin Silicon Dioxide Layers in Ultra High Vacuum",
keywords = "plasma oxidation, ultra high vacuum, ultrathin silicon dioxide, plasma oxidation, ultra high vacuum, ultrathin silicon dioxide, plasma oxidation, ultra high vacuum, ultrathin silicon dioxide",
author = "T. Majamaa and V-M. Airaksinen and J. Sinkkonen",
year = "1996",
language = "English",
volume = "107",
pages = "172--177",
journal = "Applied Surface Science",
issn = "1873-5584",
publisher = "Elsevier",
number = "Nov. II",
}