@techreport{74dc0291c69144beaa1973b6d27a5d81,
title = "Fabrication of nanoperforated silicon membranes with tunalbe sized high aspect ratio perforations",
author = "Lauri Sainiemi and Jukka Viheri{\"a}l{\"a} and Janne Laukkanen and Tapio Niemi and Sami Franssila",
year = "2009",
language = "English",
series = "The 15th International Conference on solid-state sensors, actuators and microsystems, Denver, USA, June 21-25 2009",
publisher = "IEEE",
pages = "200--203",
type = "WorkingPaper",
institution = "IEEE",
}