@article{96a2f5edc5e045ebbeeb5e2f2fec8f48,
title = "Fabrication of a silicon based electroluminescent device",
keywords = "nanostructures, RIE, self-organised mask, silicon, nanostructures, RIE, self-organised mask, silicon, nanostructures, RIE, self-organised mask, silicon",
author = "A. Malinin and V. Ovchinnikov and S. Novikov and C. Tuovinen and A. Hovinen",
year = "2000",
language = "English",
volume = "B74",
pages = "32--35",
journal = "Materials Science & Engineering B",
issn = "0921-5107",
publisher = "Elsevier",
number = "1-3",
}