@article{1ad810e543594740ab40fb9b0f0ee6c4,
title = "Fabrication and characterization of an ultrasensitive acousto-optical cantilever for pressure sensing",
keywords = "acousto-optics, micromechanics, silicon cantilever, transducer, acousto-optics, micromechanics, silicon cantilever, transducer, acousto-optics, micromechanics, silicon cantilever, transducer",
author = "P{\"a}ivi Sievil{\"a} and Ville-Pekka Rytk{\"o}l{\"a} and Ossi Hahtela and Nikolai Chekurov and Jyrki Kauppinen and Ilkka Tittonen",
year = "2007",
language = "English",
volume = "17",
pages = "852--859",
journal = "Journal of Micromechanics and Microengineering",
issn = "1361-6439",
publisher = "Institute of Physics Publishing",
number = "5",
}