@inproceedings{e411c2234b394a0a89fbac11e0bfcd87,
title = "Extraction of the Opto-Geometrical Properties of Gratings from Scattering Data by Means of the Neural Network",
keywords = "diffraction gratings, neural networks, optical scatterometry, diffraction gratings, neural networks, optical scatterometry, diffraction gratings, neural networks, optical scatterometry",
author = "I. Kallioniemi and J. Saarinen and E. Oja",
year = "1997",
language = "English",
pages = "202--203",
booktitle = "Diffractive Optics, Savonlinna, Finland, July 7-9, 1997",
}