@techreport{c6cd80ba70204aaf86e0255550799e2e,
title = "Extraction of the opto-geometrical properties of gratings from scattering data by means of the neural network",
keywords = "diffraction theory, diffractive optics, neural networks, scatterometry, diffraction theory, diffractive optics, neural networks, scatterometry, diffraction theory, diffractive optics, neural networks, scatterometry",
author = "I. Kallioniemi and J. Saarinen and E. Oja",
year = "1997",
language = "English",
series = "European Optical Society Topical Meeting in Diffractive Optics, Savonlinna, Suomi, 7.7-9.7.1997",
publisher = "EOS - European Optical Society",
pages = "202--203",
type = "WorkingPaper",
institution = "EOS - European Optical Society",
}