@article{ad3cbe7b34bf4e84bfa8e565e74a55f1,
title = "Experimental validation of compact damping models of perforated MEMS devices",
keywords = "gas damping, MEMS, perforation, quality factor, resonator, gas damping, MEMS, perforation, quality factor, resonator, gas damping, MEMS, perforation, quality factor, resonator",
author = "Timo Veijola and \{De Pasquale\}, Giorgio and Aurelio Som{\`a}",
year = "2009",
language = "English",
volume = "15",
pages = "1121--1128",
journal = "Microsystem Technologies: Micro-and Nanosystems-Information Storage and Processing Systems",
issn = "1432-1858",
publisher = "Springer",
number = "8",
}