@techreport{40d32ce3772846a38815bb2caedf2aeb,
title = "Electromechanical analysis of micromechanical SOI-fabricated RF resonators",
keywords = "FEM, non-linearity, resonator, RF-MEMS, FEM, non-linearity, resonator, RF-MEMS, FEM, non-linearity, resonator, RF-MEMS",
author = "T. Lamminm{\"a}ki and K. Ruokonen and I. Tittonen and T. Mattila and O. Jaakkola and A. Oja and H. Sepp{\"a} and P. Sepp{\"a}l{\"a} and J. Kiiham{\"a}ki",
year = "2000",
language = "English",
series = "Third International Conference on Modeling and Simultation of Microsystems, San Diego, USA, March 27-29, 2000",
pages = "217--220",
type = "WorkingPaper",
}