@article{0f8d31e9cf3d43ffae9b0f5ccac111e1,
title = "Effective passivation of black silicon surfaces by atomic layer deposition",
keywords = "aluminum oxide, atomic layer deposition, black silicon, nanostructures, aluminum oxide, atomic layer deposition, black silicon, nanostructures, aluminum oxide, atomic layer deposition, black silicon, nanostructures",
author = "P{\"a}ivikki Repo and Antti Haarahiltunen and Lauri Sainiemi and Marko Yli-Koski and Heli Talvitie and Martin Schubert and Hele Savin",
year = "2013",
doi = "10.1109/JPHOTOV.2012.2210031",
language = "English",
volume = "3",
pages = "90--94",
journal = "IEEE Journal of Photovoltaics",
issn = "2156-3381",
publisher = "IEEE",
number = "1",
}