@inproceedings{894c3d438c47484ca59409086b890c00,
title = "Effect of transition metals on oxygen precipitation in silicon",
keywords = "oxygen, silicon, transition metals, oxygen, silicon, transition metals, oxygen, silicon, transition metals",
author = "Heli Talvitie and Antti Haarahiltunen and Marko Yli-Koski and Hele Savin and Juha Sinkkonen",
year = "2008",
doi = "10.1088/1742-6596/100/7/072045",
language = "English",
volume = "100",
series = "Journal of Physics: Conference Series",
publisher = "Institute of Physics Publishing",
booktitle = "International Conference on Nanoscience and Technology",
address = "United Kingdom",
note = "International Conference on Nanoscience and Technology, ICNT ; Conference date: 02-07-2007 Through 06-07-2007",
}