@techreport{9c0379192dd844f9925e2079c558dbb1,
title = "Diffractive shaping of excimer-laser beams for pulsed laser deposition",
keywords = "beam shaping, diffractive grating, excimer laser, flat-top profile, beam shaping, diffractive grating, excimer laser, flat-top profile, beam shaping, diffractive grating, excimer laser, flat-top profile",
author = "Antti Hakola and Timo Kajava and Henna Elfstr{\"o}m and Janne Simonen and Pertti P{\"a}{\"a}kk{\"o}nen and Jari Turunen",
year = "2006",
language = "English",
isbn = "951-22-8250-X",
series = "Teknillisen korkeakoulun teknillisen fysiikan julkaisuja",
publisher = "Teknillinen korkeakoulu",
number = "TKK-F-A843",
pages = "4",
type = "WorkingPaper",
institution = "Teknillinen korkeakoulu",
}