@techreport{fbd59b5e7260438087a2aa3714b17dd2,
title = "Diffractive shaping of excimer-laser beams",
keywords = "beam shaping, diffractive grating, excimer laser, flat-top profile, beam shaping, diffractive grating, excimer laser, flat-top profile, beam shaping, diffractive grating, excimer laser, flat-top profile",
author = "Antti Hakola and Timo Kajava and Henna Elfstr{\"o}m and Pertti P{\"a}{\"a}kk{\"o}nen and Jari Turunen",
year = "2006",
language = "English",
series = "Northern Optics 2006, Bergen, Norja, 14.-16.6.2006",
publisher = "UniK, FFI, NTNU, and University of Bergen",
pages = "162",
type = "WorkingPaper",
institution = "UniK, FFI, NTNU, and University of Bergen",
}