Determination of thin film parameters from high accuracy spectrophotometric measurements

Saulius Nevas; Farshid Manoocheri; Erkki Ikonen

Determination of thin film parameters from high accuracy spectrophotometric measurements

Saulius Nevas, Farshid Manoocheri, Erkki Ikonen

Tutkimustuotos: Työpaperi › Working paper › Professional

Alkuperäiskieli	Englanti
Tila	Julkaistu - 2002
OKM-julkaisutyyppi	D4 Julkaistu kehittämis- tai tutkimusraportti taikka -selvitys

Julkaisusarja

Nimi	4th International Conference on Materials for Microelectronics and Nanoengineering, Hanasaari Cultural Centre, Espoo, Finland, June 10-12, 2002

Siteeraa tätä

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title = "Determination of thin film parameters from high accuracy spectrophotometric measurements",

author = "Saulius Nevas and Farshid Manoocheri and Erkki Ikonen",

year = "2002",

language = "English",

series = "4th International Conference on Materials for Microelectronics and Nanoengineering, Hanasaari Cultural Centre, Espoo, Finland, June 10-12, 2002",

type = "WorkingPaper",

}

TY - UNPB

T1 - Determination of thin film parameters from high accuracy spectrophotometric measurements

AU - Nevas, Saulius

AU - Manoocheri, Farshid

AU - Ikonen, Erkki

PY - 2002

Y1 - 2002

M3 - Working paper

T3 - 4th International Conference on Materials for Microelectronics and Nanoengineering, Hanasaari Cultural Centre, Espoo, Finland, June 10-12, 2002

BT - Determination of thin film parameters from high accuracy spectrophotometric measurements

ER -