Design and fabrication of a tuning fork shaped voltage controlled resonator for low-voltage applications with additional tuning electrodes

Tutkimustuotos: Lehtiartikkeli › Article › Scientific › vertaisarvioitu

3 Sitaatiot (Scopus)

Alkuperäiskieli	Englanti
Sivut	--
Julkaisu	Journal of Micromechanics and Microengineering
Numero	11
DOI - pysyväislinkit	https://doi.org/10.1088/0960-1317/23/11/115004
Tila	Julkaistu - 2013
OKM-julkaisutyyppi	A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä

Pääsy asiakirjaan

@article{b21668b701ee4d489cc20ce95fc1ce6d,

title = "Design and fabrication of a tuning fork shaped voltage controlled resonator for low-voltage applications with additional tuning electrodes",

author = "Jakub Gronicz and Nikolai Chekurov and Marko Kosunen and Ilkka Tittonen",

year = "2013",

doi = "10.1088/0960-1317/23/11/115004",

language = "English",

pages = "----",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "Institute of Physics Publishing",

number = "11",

}

TY - JOUR

T1 - Design and fabrication of a tuning fork shaped voltage controlled resonator for low-voltage applications with additional tuning electrodes

AU - Gronicz, Jakub

AU - Chekurov, Nikolai

AU - Kosunen, Marko

AU - Tittonen, Ilkka

PY - 2013

Y1 - 2013

UR - http://iopscience.iop.org/0960-1317/23/11/115004/

U2 - 10.1088/0960-1317/23/11/115004

DO - 10.1088/0960-1317/23/11/115004

M3 - Article

SN - 0960-1317

SP - --

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 11

ER -