Depth Profiling and Quantification in Thin Film Heterostructure Materials by Secondary Mass Spectrometry

E.O. Ristolainen, P. Holloway

Tutkimustuotos: Artikkeli kirjassa/konferenssijulkaisussa › Conference contribution › Scientific › vertaisarvioitu

Alkuperäiskieli	Englanti
Otsikko	4th European Vacuum Conference, 13-17 June, 1994, Uppsala
Tila	Julkaistu - 1994
OKM-julkaisutyyppi	A4 Artikkeli konferenssijulkaisuussa

Tutkimusalat

@inproceedings{4eb244498ee04cebb9f1bad765c22318,

title = "Depth Profiling and Quantification in Thin Film Heterostructure Materials by Secondary Mass Spectrometry",

keywords = "heterostructure, SIMS, thin film, heterostructure, SIMS, thin film, heterostructure, SIMS, thin film",

author = "E.O. Ristolainen and P. Holloway",

year = "1994",

language = "English",

booktitle = "4th European Vacuum Conference, 13-17 June, 1994, Uppsala",

}

TY - GEN

T1 - Depth Profiling and Quantification in Thin Film Heterostructure Materials by Secondary Mass Spectrometry

AU - Ristolainen, E.O.

AU - Holloway, P.

PY - 1994

Y1 - 1994

KW - heterostructure

KW - SIMS

KW - thin film

KW - heterostructure

KW - SIMS

KW - thin film

KW - heterostructure

KW - SIMS

KW - thin film

M3 - Conference contribution

BT - 4th European Vacuum Conference, 13-17 June, 1994, Uppsala

ER -