@inproceedings{03dd4562407d4c559ddcac3a2ce5c29c,
title = "Deposition of thin films of lanthanum sulfide",
keywords = "atomic layer epitaxy, lanthanum sulfide, thin film, XPS, XRD, atomic layer epitaxy, lanthanum sulfide, thin film, XPS, XRD, atomic layer epitaxy, lanthanum sulfide, thin film, XPS, XRD",
author = "K. Kukli and H. Heikkinen and E. Nyk{\"a}nen and L. Niinist{\"o}",
year = "1997",
language = "English",
pages = "15",
editor = "A. Rosental",
booktitle = "The 4th Baltic Symposium on Atomic Layer Epitaxy, Tartu, Estonia, October 10-11, 1997",
}