Deep plasme etching of glass for fluidic devices

K. Kolari, V. Saarela, S. Franssila

Tutkimustuotos: Työpaperi › Working paper › Professional

Alkuperäiskieli	Englanti
Tila	Julkaistu - 2007
OKM-julkaisutyyppi	D4 Julkaistu kehittämis- tai tutkimusraportti taikka -selvitys

Nimi	Proc. Micromechanics Europe, Guimares, Portugal 2007

Tutkimusalat

@techreport{9723d66a94094824819bfa28ab845912,

title = "Deep plasme etching of glass for fluidic devices",

keywords = "DRIE, etching, glass, microfluidics, DRIE, etching, glass, microfluidics, DRIE, etching, glass, microfluidics",

author = "K. Kolari and V. Saarela and S. Franssila",

year = "2007",

language = "English",

series = "Proc. Micromechanics Europe, Guimares, Portugal 2007",

type = "WorkingPaper",

}

TY - UNPB

T1 - Deep plasme etching of glass for fluidic devices

AU - Kolari, K.

AU - Saarela, V.

AU - Franssila, S.

PY - 2007

Y1 - 2007

KW - DRIE

KW - etching

KW - glass

KW - microfluidics

KW - DRIE

KW - etching

KW - glass

KW - microfluidics

KW - DRIE

KW - etching

KW - glass

KW - microfluidics

M3 - Working paper

T3 - Proc. Micromechanics Europe, Guimares, Portugal 2007

BT - Deep plasme etching of glass for fluidic devices

ER -