@article{f420d50d237f4a3ea228e4e07d3afdd8,
title = "Damping of a vibrating beam",
keywords = "acoustics, microelectromechanical systems, acoustics, microelectromechanical systems, acoustics, microelectromechanical systems",
author = "J. Hietanen and J. Bomer and J. Jonsmann and W. Olthuis and P. Bergveld and K. Kaski",
year = "2000",
doi = "10.1016/S0924-4247(00)00423-4",
language = "English",
pages = "39--44",
journal = "Sensors and Actuators A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "86",
}