@inproceedings{88cf0f38a5f94bfd9681ca044236a97a,
title = "Controlled formation of thin V_(2)O_(5) layers on silica by Atomic Layer Deposition",
keywords = "ALD, atomic layer deposition, dispersion, silica, supported vanadium oxide, ALD, atomic layer deposition, dispersion, silica, supported vanadium oxide, ALD, atomic layer deposition, dispersion, silica, supported vanadium oxide",
author = "Jetta Ker{\"a}nen and Satu Ek and Eero Iiskola and A. Aroux and Lauri Niinist{\"o}",
year = "2001",
language = "English",
booktitle = "2nd Int. Conference on Silica 2001, september 3-6.2001, Mulhouse France",
}