@article{55f1cb86226d42859ca24a25627688af,
title = "Contactless Diagnostic Tools and Metallic Contamination in the Semiconductor Industry",
keywords = "carrier lifetime, characterization, copper, iron, nickel, silicon, carrier lifetime, characterization, copper, iron, nickel, silicon, carrier lifetime, characterization, copper, iron, nickel, silicon",
author = "Hele Savin and Marko Yli-Koski and Antti Haarahiltunen and Heli Talvitie and Juha Sinkkonen",
year = "2007",
language = "English",
volume = "11",
pages = "319--330",
journal = "ECS Transactions",
issn = "1938-5862",
publisher = "Institute of Physics Publishing",
number = "3",
}