@inproceedings{24fb421c55454ddcbf7f8cccd2bb54d5,
title = "Compact Squeezed-Film Damping Model Including the Open Border Effects",
keywords = "acoustic impedance, damping in microstructures, fringe flow, Gas damping, MEMS, Reynolds equation, acoustic impedance, damping in microstructures, fringe flow, Gas damping, MEMS, Reynolds equation, acoustic impedance, damping in microstructures, fringe flow, Gas damping, MEMS, Reynolds equation",
author = "T. Veijola and K. Ruokonen and I. Tittonen",
year = "2001",
language = "English",
pages = "76--79",
booktitle = "The 4th International Conference on Modeling and Simulation of Microsystems, 19-21.3.2001, South Carolina, USA",
}