Characterization, surface treatment and nanofabrication by charged particle beams

Antti Peltonen

Characterization, surface treatment and nanofabrication by charged particle beams

Julkaisun otsikon käännös: Karakterisointi, pintakäsittely ja nanovalmistus varattuja hiukkassuihkuja käyttäen

Antti Peltonen

Elektroniikan ja nanotekniikan laitos

Tutkimustuotos: Doctoral Thesis › Collection of Articles

Abstrakti

Elektronimikroskoopit ovat vakiinnuttaneet asemansa ensisijaisena analysointimenetelmänä useille eri materiaaleille ja sovelluksille. Elektronisuihkuja hyödyntävien laitteiden rinnalle on vuosien saatossa kehitetty kohdennettuja ionisuihkuja hyödyntäviä järjestelmiä, joiden käyttö on laajentunut materiaalien analysoinnista hienostuneisiin mikro- ja nanovalmistusmenetelmiin. Yhdistämällä kohdennettu elektroni- ja ionisuihku samaan laitteeseen, on analysointi ja mikrovalmistusmenetelmiä saatu monipuolistettua. Tässä väitöskirjassa esitellään varattuihin hiukkassäteisiin perustuvia menetelmiä, joista kolmea käsitellään tarkemmin. Elektronimikroskopia, elektronitomografia ja kohdennetut ionisuihkut ovat vakiintuneita menetelmiä ja tässä työssä niitä hyödynnetään materiaalien analysointiin. Lisäksi, väitöskirjassa kohdennettuja ionisäteitä käytetään toteutettaessa mikrokokoisia laitteita. Tässä väitöskirjassa kohdennettua ionisuihkua käytetään pääasiallisena valmistusmenetelmänä toteutettaessa laitealustaa mikrolaitteille. Samaisella ionisuihkumenetelmällä voidaan seostaa materiaaleja galliumilla hyvin tarkasti, joka mahdollistaa piihin perustuvien korkean aspektisuhteen mikro- ja nanorakenteiden nopean valmistamisen. Toiminnalliset laitteet on valmistettu piille prosessilla, jossa on yhdistetty kuviointi kohdennetulla ionisäteellä ja syvä reaktiivinen ionisyövytys. Uranyyliformiaattivärjäysmenetelmän osoitetaan parantavan kontrastia ja erottelukykyä Nafionohutkalvolle tehdyssä elektronitomografiassa. Väitöstyössä kehitetty näytteenvalmistus- ja kuvantamismenetelmä mahdollistaa herkkien Nafionkalvojen kuvantamisen suurella erottelukyvyllä. Tässä väitöstyössä esiteltyjä analysointimenetelmiä hyödynnetään mm. analysoimalla ohuita Nafionyhdistelmäkalvoja, joita käytetään elektroanalyyttisissä suodatinsovelluksissa. Työssä esitellään sormenpistoksesta otettavan verinäytteeseen perustuva testiliuska, jossa hyödynnetään Nafionhiilinanoputkikalvon suodatusominaisuuksia. Työssä esitellään myös kuparin kasvumekanismi sähkösaostusprosessissa hiilinanoputkikuiduille. Hiilinanoputki-kuparikuitujen sähkönjohtavuuden osoitetaan kasvavan esitellyllä menetelmällä. Myös teräksen korroosiosuojausta tutkittiin. Krominitridillä pinnoitettujen teräspintojen korroosionkestävyys paranee merkittävästi, kun pintakerroksessa olevat huokoset kasvatetaan umpeen atomikerroskasvatusmenetelmällä tehdyllä nanolaminaatilla. Lisäksi väitöstyössä esitellään valmistusmenetelmä tuplalankarakenne nanolangoille samalle substraatille. Uusi valmistusmenetelmä mahdollistaa nanolankojen koostumuksen ja optisten ominaisuuksien hienosäädön, jota voidaan hyödyntää optisissa antureissa.

Julkaisun otsikon käännös	Karakterisointi, pintakäsittely ja nanovalmistus varattuja hiukkassuihkuja käyttäen
Alkuperäiskieli	Englanti
Pätevyys	Tohtorintutkinto
Myöntävä instituutio	Aalto-yliopisto
Valvoja/neuvonantaja	Tittonen, Ilkka, Vastuuprofessori
Kustantaja	Aalto University
Painoksen ISBN	978-952-64-0510-0
Sähköinen ISBN	978-952-64-0511-7
Tila	Julkaistu - 2021
OKM-julkaisutyyppi	G5 Artikkeliväitöskirja

Tutkimusalat

kohdennettu ionisuihku
elektronitomografia
nanovalmistus
kuivaetsaus
atomikerroskasvatus

Pääsy asiakirjaan

http://urn.fi/URN:ISBN:978-952-64-0511-7

OtaNano
Rissanen, A. (Manager)
Aalto-yliopisto
Laitteistot/tilat: Facility
OtaNano Nanofab
Repo, P. (Manager) & Rissanen, A. (Other)
OtaNano
Laitteistot/tilat: Facility
OtaNano Nanomikroskopiakeskus
Seitsonen, J. (Manager) & Rissanen, A. (Other)
OtaNano
Laitteistot/tilat: Facility

Siteeraa tätä

@phdthesis{40709ad4bb4e4f8e9d81ecf708b63be4,

title = "Characterization, surface treatment and nanofabrication by charged particle beams",

abstract = "Surface characterization and modification methods are an essential part of modern micro- and nanofabrication. Over the course of nine decades, electron microscopy has emerged as the main analysis method for a wide variety of materials. Developed in parallel with machines utilizing beams of electrons, focused ion beam systems have made their way from early analysis tools to include options for sophisticated fabrication of miniaturized devices. With a combined method of implementing electron and ion beams into the same machine, the number of analysis options has increased. In this thesis, three charged particle-beam methods are introduced that play a pivotal role throughout the work. While electron microscopy, electron tomography and focused ion beam are all established methods, in this work they are applied in materials analysis. In addition, in this work a focused ion beam is used as the main fabrication method in realizing both microdevices and thin-film device platforms. Several other standard fabrication techniques are applied in various processes throughout the work in realizing the presented applications. Focused ion-beam milling is applied to produce a device platform for low temperature physics applications. Focused ion-beam method also allows a rapid nanofabrication of silicon structures by gallium mask doping of silicon. Functional devices are fabricated by a combination of focused ion-beam doping and dry etching. This hybrid fabrication method enables high aspect ratio micro- and nanostructures. Charged particle beam based material characterization methods are applied to compound Nafion thin films for electroanalytical filtering applications. A standard negative staining method using uranyl formate was applied to Nafion thin films and is shown to improve both contrast and resolution in electron tomography. A new sample preparation method is developed and deployed together with new imaging modes enabling imaging of beam-sensitive Nafion in high resolution. A finger prick blood test strip based on the filtering properties of Nafion and carbon nanotubes is developed. The electrodeposition of copper on carbon nanotube fiber bundles is shown to be capable of increasing the electrical conductance of the bundle, and the copper growth mechanism of bundles is explained. Also it is shown that the corrosion protection of chromium nitride on steel is increased by closing the surface pinholes with an atomic-layer-deposited nanolaminates. Moreover a fabrication method of dual-type nanowires on a single substrate is introduced. Dual-type nanowires are fabricated in a novel method, that enables the fine tuning of the chemistry and optical properties of the nanowires for optical sensor applications.",

keywords = "focused ion beam, electrontomography, nanofabrication, dry etching, atomic layer deposition, FIB, kohdennettu ionisuihku, elektronitomografia, nanovalmistus, kuivaetsaus, atomikerroskasvatus, focused ion beam, electrontomography, nanofabrication, dry etching, atomic layer deposition, FIB",

author = "Antti Peltonen",

year = "2021",

language = "English",

isbn = "978-952-64-0510-0",

series = "Aalto University publication series DOCTORAL DISSERTATIONS",

publisher = "Aalto University",

number = "125",

address = "Finland",

school = "Aalto University",

}

TY - BOOK

T1 - Characterization, surface treatment and nanofabrication by charged particle beams

AU - Peltonen, Antti

PY - 2021

Y1 - 2021

N2 - Surface characterization and modification methods are an essential part of modern micro- and nanofabrication. Over the course of nine decades, electron microscopy has emerged as the main analysis method for a wide variety of materials. Developed in parallel with machines utilizing beams of electrons, focused ion beam systems have made their way from early analysis tools to include options for sophisticated fabrication of miniaturized devices. With a combined method of implementing electron and ion beams into the same machine, the number of analysis options has increased. In this thesis, three charged particle-beam methods are introduced that play a pivotal role throughout the work. While electron microscopy, electron tomography and focused ion beam are all established methods, in this work they are applied in materials analysis. In addition, in this work a focused ion beam is used as the main fabrication method in realizing both microdevices and thin-film device platforms. Several other standard fabrication techniques are applied in various processes throughout the work in realizing the presented applications. Focused ion-beam milling is applied to produce a device platform for low temperature physics applications. Focused ion-beam method also allows a rapid nanofabrication of silicon structures by gallium mask doping of silicon. Functional devices are fabricated by a combination of focused ion-beam doping and dry etching. This hybrid fabrication method enables high aspect ratio micro- and nanostructures. Charged particle beam based material characterization methods are applied to compound Nafion thin films for electroanalytical filtering applications. A standard negative staining method using uranyl formate was applied to Nafion thin films and is shown to improve both contrast and resolution in electron tomography. A new sample preparation method is developed and deployed together with new imaging modes enabling imaging of beam-sensitive Nafion in high resolution. A finger prick blood test strip based on the filtering properties of Nafion and carbon nanotubes is developed. The electrodeposition of copper on carbon nanotube fiber bundles is shown to be capable of increasing the electrical conductance of the bundle, and the copper growth mechanism of bundles is explained. Also it is shown that the corrosion protection of chromium nitride on steel is increased by closing the surface pinholes with an atomic-layer-deposited nanolaminates. Moreover a fabrication method of dual-type nanowires on a single substrate is introduced. Dual-type nanowires are fabricated in a novel method, that enables the fine tuning of the chemistry and optical properties of the nanowires for optical sensor applications.

AB - Surface characterization and modification methods are an essential part of modern micro- and nanofabrication. Over the course of nine decades, electron microscopy has emerged as the main analysis method for a wide variety of materials. Developed in parallel with machines utilizing beams of electrons, focused ion beam systems have made their way from early analysis tools to include options for sophisticated fabrication of miniaturized devices. With a combined method of implementing electron and ion beams into the same machine, the number of analysis options has increased. In this thesis, three charged particle-beam methods are introduced that play a pivotal role throughout the work. While electron microscopy, electron tomography and focused ion beam are all established methods, in this work they are applied in materials analysis. In addition, in this work a focused ion beam is used as the main fabrication method in realizing both microdevices and thin-film device platforms. Several other standard fabrication techniques are applied in various processes throughout the work in realizing the presented applications. Focused ion-beam milling is applied to produce a device platform for low temperature physics applications. Focused ion-beam method also allows a rapid nanofabrication of silicon structures by gallium mask doping of silicon. Functional devices are fabricated by a combination of focused ion-beam doping and dry etching. This hybrid fabrication method enables high aspect ratio micro- and nanostructures. Charged particle beam based material characterization methods are applied to compound Nafion thin films for electroanalytical filtering applications. A standard negative staining method using uranyl formate was applied to Nafion thin films and is shown to improve both contrast and resolution in electron tomography. A new sample preparation method is developed and deployed together with new imaging modes enabling imaging of beam-sensitive Nafion in high resolution. A finger prick blood test strip based on the filtering properties of Nafion and carbon nanotubes is developed. The electrodeposition of copper on carbon nanotube fiber bundles is shown to be capable of increasing the electrical conductance of the bundle, and the copper growth mechanism of bundles is explained. Also it is shown that the corrosion protection of chromium nitride on steel is increased by closing the surface pinholes with an atomic-layer-deposited nanolaminates. Moreover a fabrication method of dual-type nanowires on a single substrate is introduced. Dual-type nanowires are fabricated in a novel method, that enables the fine tuning of the chemistry and optical properties of the nanowires for optical sensor applications.

KW - focused ion beam

KW - electrontomography

KW - nanofabrication

KW - dry etching

KW - atomic layer deposition

KW - FIB

KW - kohdennettu ionisuihku

KW - elektronitomografia

KW - nanovalmistus

KW - kuivaetsaus

KW - atomikerroskasvatus

KW - focused ion beam

KW - electrontomography

KW - nanofabrication

KW - dry etching

KW - atomic layer deposition

KW - FIB

M3 - Doctoral Thesis

SN - 978-952-64-0510-0

T3 - Aalto University publication series DOCTORAL DISSERTATIONS

PB - Aalto University

ER -

Characterization, surface treatment and nanofabrication by charged particle beams

Abstrakti

Tutkimusalat

Pääsy asiakirjaan

Sormenjälki

Laitteet

OtaNano

OtaNano Nanofab

OtaNano Nanomikroskopiakeskus

Siteeraa tätä