@article{748d091465314045a90e7e51385b5bb3,
title = "Characterization of the feature-size dependence in Ar/C12 chemically assisted ion beam etching of InP-based photonic crystal devices",
keywords = "fotonikide, indiumfosfidi, nanotekniikka, fotonikide, indiumfosfidi, nanotekniikka, fotonikide, indiumfosfidi, nanotekniikka",
author = "A. Berrier and M. Mulot and G. Malm and M. Ostling and S. Anand and A. Talneuau and R. Farrini and R. Houdre",
year = "2007",
language = "English",
volume = "25",
pages = "1--10",
journal = "Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "American Institute of Physics",
number = "1",
}