@article{93957904fec2425eab54a79d29e4a6fb,
title = "Characterization of Diffraction Gratings in a Rigorous Domain with Optical Scatterometry: Hierarchical Neural-Network Model",
keywords = "diffraction gratings, inverse problems, neural networks, diffraction gratings, inverse problems, neural networks, diffraction gratings, inverse problems, neural networks",
author = "Ilkka Kallioniemi and J. Saarinen and Erkki Oja",
year = "1999",
language = "English",
volume = "38",
pages = "5920--5930",
journal = "Applied Optics",
issn = "2155-3165",
publisher = "Optical Society of America (OSA)",
number = "28",
}