@inproceedings{0c2c8855b0f1430b94a13e454ec105a5,
title = "Capacitive Microphone with Low-stress Polysilicon Membrane and High-stress Polysilicon Backplate",
keywords = "capacitive, microphone, polysilicon, stress, capacitive, microphone, polysilicon, stress, capacitive, microphone, polysilicon, stress",
author = "Hannu Sipola and Heikki Sepp{\"a} and J. Saarilahti and Outi Rusanen and Jarmo Hietanen",
year = "1999",
language = "English",
pages = "57--60",
editor = "M. Bartek",
booktitle = "Eurosensors 13., The Hague, 12. - 15.9.1999",
publisher = "Delft University of Technology",
address = "Netherlands",
}