Cantilever-based photoacoustic sensor for terahertz range

Erkki Ikonen*, Sucheta Sharma, Mohsen Ahmadi, Jussi Rossi, Markku Vainio, Zhipei Sun, Andreas Steiger

*Tämän työn vastaava kirjoittaja

Tutkimustuotos: LehtiartikkeliConference articleScientificvertaisarvioitu

38 Lataukset (Pure)

Abstrakti

Advantages of photoacoustic detection with a silicon cantilever microphone are demonstrated in the THz range. In our method, earlier membrane microphone is replaced with robust silicon cantilever microphone, which can tolerate high intensity of the input radiation in contrast to vulnerable membrane. The responsivity of the photoacoustic sensor was confirmed to be constant over almost six orders of magnitude of input power, which is not easy to achieve with any other detector of THz radiation. Another favorable feature of the photoacoustic sensor is its uniform spatial responsivity over areas of several millimeters in size. Finally, we measured nearly constant spectral responsivity of the photoacoustic sensor for the wavelength range of 0.3 µm to 200 µm.

AlkuperäiskieliEnglanti
JulkaisuProceedings of SPIE - The International Society for Optical Engineering
DOI - pysyväislinkit
TilaJulkaistu - 2023
OKM-julkaisutyyppiA4 Artikkeli konferenssijulkaisussa
TapahtumaTerahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications - San Francisco, Yhdysvallat
Kesto: 30 tammik. 20231 helmik. 2023

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