@inproceedings{cc8ecd8cfdec4ac78c02f5604a5d132a,
title = "Built-in Potentials Affecting the Stability of Micromechanical Systems",
keywords = "built-in potential, built-in voltage, micromechanics, stability, built-in potential, built-in voltage, micromechanics, stability, built-in potential, built-in voltage, micromechanics, stability",
author = "Mika Koskenvuori and Ville-Pekka Rytk{\"o}nen and Pekka Rantakari and Ilkka Tittonen",
year = "2005",
language = "English",
isbn = "951-22-7555-4",
series = "Report / Helsinki University of Technology, Laboratory of Physics",
publisher = "Helsinki University of Technology",
number = "229",
editor = "Tomi Ruokola and \{von Boehm\}, Juhani",
booktitle = "Proceedings of the XXXIX Annual Conference of the Finnish Physical Society",
address = "Finland",
note = "Physics Days : Annual Meeting of the Finnish Physical Society ; Conference date: 17-03-2005 Through 19-03-2005",
}