Projekteja vuodessa
Abstrakti
Atomic layer deposition (ALD) for high-quality conformal inorganic thin films is one of the cornerstones of modern microelectronics, while molecular layer deposition (MLD) is its less-exploited counterpart for purely organic thin films. Currently, the hybrid of these two techniques, i.e., ALD/MLD, is strongly emerging as a state-of-the-art gas-phase route for designer's metal–organic thin films, e.g., for the next-generation energy technologies. The ALD/MLD literature comprises nearly 300 original journal papers covering most of the alkali and alkaline earth metals, 3d transition metals, and lanthanides as the metal component and a variety of aliphatic, aromatic, and natural organic components. Some of these ALD/MLD processes yield in situ crystalline coordination-polymer- or metal–organic-framework-like structures. Another attractive aspect is that many of the metal–organics realized through ALD/MLD are fundamentally new materials, and even unaccessible through conventional synthesis. Here, the current state of research in the field is presented, by i) providing a comprehensive account of the ALD/MLD processes so far developed, ii) addressing the constraints/possibilities for growing in situ crystalline metal–organic films, iii) highlighting some intriguing ALD/MLD materials and their application potential, and iv) making a brief outlook to the future perspectives and challenges in the field.
Alkuperäiskieli | Englanti |
---|---|
Artikkeli | 2200210 |
Julkaisu | Advanced Materials Interfaces |
Vuosikerta | 9 |
Numero | 15 |
Varhainen verkossa julkaisun päivämäärä | 20 huhtik. 2022 |
DOI - pysyväislinkit | |
Tila | Julkaistu - 23 toukok. 2022 |
OKM-julkaisutyyppi | A2 Katsausartikkeli tieteellisessä aikakauslehdessä |
Sormenjälki
Sukella tutkimusaiheisiin 'Atomic/Molecular Layer Deposition for Designer's Functional Metal–Organic Materials'. Ne muodostavat yhdessä ainutlaatuisen sormenjäljen.Projektit
- 2 Päättynyt
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PREIN: Fotoniikan Tutkimus ja Innovaatio
Mäkelä, K. (Vastuullinen tutkija)
01/01/2019 → 31/12/2022
Projekti: Academy of Finland: Other research funding
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Molecular-Layer-Engineered Inorganic-Organic Hybrid Materials
Karppinen, M. (Vastuullinen tutkija)
23/12/2013 → 31/01/2019
Projekti: EU: ERC grants