Atomic layer deposition of thin aluminium oxide films for carbon nanotube based transitors

M.Y Zavodchikova, A.G Nasibulin, K. Grigoras, E.I Kauppinen, V. Ermolov, S. Franssila

Tutkimustuotos: Työpaperi › Working paper › Professional

Alkuperäiskieli	Englanti
Sivut	160-161
Tila	Julkaistu - 2009
OKM-julkaisutyyppi	D4 Julkaistu kehittämis- tai tutkimusraportti taikka -selvitys

Nimi	4th International Conference on Surfaces, Coatings and Nanostructured Materials, Rome, Italy, Oct 19-22

Siteeraa tätä

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title = "Atomic layer deposition of thin aluminium oxide films for carbon nanotube based transitors",

author = "M.Y Zavodchikova and A.G Nasibulin and K. Grigoras and E.I Kauppinen and V. Ermolov and S. Franssila",

year = "2009",

language = "English",

series = "4th International Conference on Surfaces, Coatings and Nanostructured Materials, Rome, Italy, Oct 19-22",

pages = "160--161",

type = "WorkingPaper",

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TY - UNPB

T1 - Atomic layer deposition of thin aluminium oxide films for carbon nanotube based transitors

AU - Zavodchikova, M.Y

AU - Nasibulin, A.G

AU - Grigoras, K.

AU - Kauppinen, E.I

AU - Ermolov, V.

AU - Franssila, S.

PY - 2009

Y1 - 2009

M3 - Working paper

T3 - 4th International Conference on Surfaces, Coatings and Nanostructured Materials, Rome, Italy, Oct 19-22

SP - 160

EP - 161

BT - Atomic layer deposition of thin aluminium oxide films for carbon nanotube based transitors

ER -