@article{2317b835a0d8467eb4f15cc7754987b9,
title = "Atomic layer deposited thin films for corrosion protection",
keywords = "aluminium oxide, atomic layer deposition, coating, electrochemical impedance spectroscopy, tantalum oxide, titanium oxide, aluminium oxide, atomic layer deposition, coating, electrochemical impedance spectroscopy, tantalum oxide, titanium oxide, aluminium oxide, atomic layer deposition, coating, electrochemical impedance spectroscopy, tantalum oxide, titanium oxide",
author = "R. Matero and M. Ritala and M. Leskel{\"a} and T. Salo and J. Aromaa and O. Fors{\'e}n",
year = "1999",
language = "English",
volume = "9",
pages = "493--499",
journal = "Journal de Physique IV",
issn = "1155-4339",
number = "Pr8",
}