@article{3ef3937f47594ca1ade4f4544f798be0,
title = "Atomic force microscopy studies of SnO_2 thin film microstructures deposited by atomic layer epitaxy",
keywords = "atomic force microscopy, atomic layer epitaxy, cross-sectional AFM, gas sensor, heteroepitaxy, tin dioxide, atomic force microscopy, atomic layer epitaxy, cross-sectional AFM, gas sensor, heteroepitaxy, tin dioxide, atomic force microscopy, atomic layer epitaxy, cross-sectional AFM, gas sensor, heteroepitaxy, tin dioxide",
author = "M. Utriainen and H. Lattu and H. Viirola and L. Niinist{\"o} and R. Resch and G. Friedbacher",
year = "2000",
language = "English",
volume = "133",
pages = "119--123",
journal = "Microchimica Acta",
issn = "1436-5073",
publisher = "Springer",
number = "1",
}